Substrate Heater

Substrate Heaters for
MBE & MOCVD Systems

E-science substrate heaters are highly robust and thermally efficient. High temperature uniformity is achieved through the incorporation of a flat serpentine filament. This design provides the maximum surface area to thermally couple with the substrate. The flat surface provides a higher emissivity towards the substrate for the same power applied to the heater. This, along with our carefully designed heat shielding, allows users to operate at a lower power achieving similar or higher temperatures at the substr

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