Gas Sources

Ultra-LT-Gas-Injector-640

Ultra Low Temperature (ULT) Gas Injector

The E-Science ULT Gas Injector produces a thermally stable gas at low temperatures with very good growth uniformity using a PBN showerhead nozzel design.

Gas Injector

Gas-Injector

 

Our Gas Injector produces a thermally stable gas at medium to high temperatures with very good growth uniformity using a PBN showerhead nozzel design.

Atomic Hydrogen Source

Atomic-Hydrogen-Source

 

The E-Science Atomic Hydrogen Source thermally cracks H2, mounts on to a 4.5″ flange and is not orientation sensitive.